Photolithography Process Filtration Solution

Photolithography process refers to the technology of transferring the patterns on the mask plate to the substrate under the action of light (usually ultraviolet light, deep ultraviolet light, extreme ultraviolet light) with the help of photoresist. Photolithography process is one of the most important steps in semiconductor manufacturing. Its cost accounts for about 1/3 of the entire silicon wafer manufacturing process, and the time consumed accounts for about 40-60% of the entire silicon wafer process. In the field of semiconductor manufacturing, as the linewidth of semiconductor processing becomes smaller and smaller, the control of extremely small contaminants in the photolithography process is extremely strict. It not only strictly controls particles, but also has strict requirements for low outgassing. Our company's products use advanced equipment and processes to produce products with excellent filtration efficiency, cleanliness, and chemical resistance to meet different SEMI photolithography process applications.