Semiconductor Wet Process Filtration Solutions

One of the biggest challenges in the semiconductor manufacturing industry is surface contamination of silicon wafers. Research has shown that defects caused by contamination can lead to electrical failures in chips, with a failure rate as high as 80%. If contaminants are not completely removed during wafer manufacturing, it can affect the yield of the wafers or even result in the scrapping of entire batches. Therefore, semiconductor cleaning processes are one of the most critical steps in semiconductor manufacturing. Wet processes, as an important part of semiconductor processes, involve etching and cleaning the wafer surface using chemicals (acids, bases, solvents, etc.) and ultra-pure water as the liquid medium.

Wafer in ultra-pure water
Typical Cleaning Tank Process(Taking SC1 as an Example)

Our company's filter products can provide excellent filtration solutions. We have filter products specifically designed for liquid filtration in semiconductor wet process applications such as SC1, SC2, 49HF, HNO3, EKC, NMP, etc. These filter products can effectively remove particles in high-purity chemicals used in the semiconductor industry, ensuring the yield of semiconductor process wafers.

Schematic diagram of cleaning tank process
Filter Points and Recommended Products
Workstation Function Recommended Filter Cartridge Series Recommended Filter Housing Series
Semiconductor wet process filtration Filter particles from SC1 solvent
  • PTFE pleated filter cartridge
  • PTFE capsule filter cartridge
  • PES pleated filter cartridge
  • PES capsule filter cartridge
  • Inline pipeline filter housing
  • Liquid filter housing